| KLA 2132 (Mainbody Only) (sn W21XX710) |
2132 |
1995 |
6", 8" |
KLA TENCOR |
2019-08-21 |
| LAM 4500 (OXIDE ETCH) (SN 3746) |
4500 |
|
|
LAM |
2019-08-20 |
| CYMER 5610 (SN 99CA632904) |
5610 |
1999 |
|
CYMER |
2019-08-07 |
| ELECTROGLAS 4090U (Automatic Wafer Prober) (H998020649-14701) |
400u |
|
8" |
ELECTROGLAS |
2019-08-07 |
| AMAT ENABLER (Oxide Etcher) (SN 414699) |
ENABLER |
2007 |
12" |
AMA |
2019-08-06 |
| KLA 2810 (Patterned Wafer Inspection) (SN 1340207) |
KLA 2810 |
2007 |
12" |
KLA |
2019-08-06 |
| DNS FC3000 (PRE METAL CLEANER) |
FC3000 |
|
12" |
DNS |
2019-08-06 |
| RUDOLPH S3000A (SN : S1075) |
S3000A |
2010 |
12" |
RUDOLPH |
2019-07-22 |
| KLA TENCOR Aleris 8330 (SN : 7271477) |
Aleris 8330 |
2013 |
12" |
KLA TENCOR |
2019-07-22 |
| AMAT P5000 CVD (3CVD & 1ETCH CHAMBER) (SN_A359) |
P5000 |
1998 |
8 |
AMAT |
2019-07-22 |
| P5000 Mark ll CVD (DxL, TEOS) (4107) |
P5000 Mark ll CVD |
|
6" |
AMAT |
2019-07-22 |
| P5000 Mark ll CVD (DxL) (SN_4714) |
P5000 Mark ll CVD |
|
8 |
AMAT |
2019-07-22 |
| TEL TE8500 (Etcher) (K85465) |
TE8500 |
2006 |
8" |
TEL |
2019-07-22 |
| AMAT P5000 Mark-ll CVD (DxL Nitride) (SN 302931) |
P5000 Mark-ll |
|
8" |
AMAT |
2019-07-17 |
| AMAT P5000 (TEOS DxL) (SN 4100) |
P5000 |
|
8" |
AMAT |
2019-07-17 |
| P5000 (DxL) (SN A429) |
P5000 |
|
8" |
AMAT |
2019-07-17 |
| RUDOLPH METAPULSE 200 (S/N. 1-06-MPO-1033-BR-01) |
Meta Pulse 200 |
1998 |
8" |
RODOLPH |
2019-07-10 |
| AMAT P5000 (WXL) (SN 4185) |
P5000 |
1994 |
6" |
AMAT |
2019-06-20 |
| AMAT P5000 (DELTA DLH) (SN 4715) |
P5000 |
|
6" |
AMAT |
2019-06-20 |
| AMAT RAIDER (SN T239511) |
RAIDER |
2010 |
12 |
AMAT |
2019-06-19 |
