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Nikon NSR-s204B (sn-6030218) CYMER LASER

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CATEGORY : LITHO(PHOTO) > SCANNER
STATUS : SOLD
MANUFACTURE : NIKON
MODEL : S204B DUV
VINTAGE : 2001
SERIAL NO : 6030218
WAFER SIZE : 8
DESCRIPTION :
NIKON S204B DUV SCANNER S/N 6030218 Sales details Location : South Korea Manufacturer : NIKON Model : S204B DUV SCANNER Wafer size : 8" Laser Source : CYMER LASER 6400 Condition : as-is / W/CREATED Shipment : packing and shipping is buyer's responsibility *if you need inspection, please let us know. • Model: S204B • Wafer Size: 200mm, notched, 6 o’clock notch orientation • Handedness: Inline left or right configuration available • Altitude: Varies by site • Lens Type: 4eN2 • Chamber Type: Standard • Chamber Temperature Set Point : 22.2 C • Variable numerical aperture: 0.55- 0.68 • sPURE • Resolution Enhancement Technology (RET) • RET Apertures iNA= 0.51, 0.45, 0.41, 0.36, 0.27, and 1/3 annular • SHRINC Illuminator Max σ; σ=0.85 • Quick Reticle Change (QRC) • Reticle Size: 6 inches • Reticle Loader along with Reticle Controller included • Reticle Barcode Reader • Field Image Alignment system (FIA) • Laser Step Alignment system (LSA) • Phase Contrast FIA • TTLFC2 • Pre-alignment 2 • Wafer Stage: Air Bearing/Linear Motors • Type 3 Ceramic Wafer Holder • Wafer Loader with Type 3 Wafer Loader Controller • Chip leveling included • Multipoint Focus/Level • Extended wafer carrier table • Pellicle Particle Detector (PPD3) • Online OCS • Nikon SECS II GEM Interface • Cymer ELS 6400 Series KrF Excimer Laser Source • Utilized for printing back-end Cu layers

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